Light modulators and optical apparatuses including the same

ABSTRACT

Provided are examples of light modulators and optical apparatuses that may include the light modulators. A light modulator may include a plasmonic nano-antenna and an element for changing plasmon resonance characteristics of the plasmonic nano-antenna. The plasmon resonance characteristics of the plasmonic nano-antenna may be changed due to a change in refractive index of the element, and thus light may be modulated.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application is a continuation of U.S. patent application Ser. No.13/337,956 which was filed on Dec. 27, 2011, and which claims thebenefit under 35 U.S.C. §119(a) of Korean Patent Application No.10-2010-0139356, filed on Dec. 30, 2010, in the Korean IntellectualProperty Office, the entire disclosure of which is incorporated hereinby reference for all purposes.

BACKGROUND

1. Field

The following description relates to light modulators and opticalapparatuses including the same.

2. Description of the Related Art

General light modulators control the flow or characteristics of lightsuch as the direction, a degree of transmission or reflection, and thelike. Light modulators typically use a mechanical motion of a lightblocking or changing element, liquid crystals, a structure of amicroelectromechanical system (MEMS), and the like, to control light.These light modulators typically have a long response time of severalmicroseconds (μs) due to their driving methods (mechanisms), and thus,they have a low operation speed.

SUMMARY

In one general aspect, there is provided a light modulator including aplasmonic nano-antenna, a refractive index change layer that is disposedadjacent to the plasmonic nano-antenna, and a refractive index changingunit configured to change a refractive index of the refractive indexchange layer, wherein, in response to the refractive index changing unitchanging the refractive index of the refractive index change layer,plasmon resonance characteristics of the plasmonic nano-antenna arechanged.

The refractive index change layer may comprise a material that has arefractive index that is capable of being changed by an electricalsignal.

The refractive index change layer may comprise an electrooptic material.

The refractive index change layer may comprise a transparent conductivematerial.

The refractive index changing unit may comprise first and secondelectrodes that are spaced apart from each other and intervening therefractive index change layer, and a voltage applying unit configured toapply a voltage between the first and second electrodes.

The refractive index change layer may be in contact with the firstelectrode, and the plasmonic nano-antenna may be disposed between therefractive index change layer and the second electrode.

At least a portion of the refractive index change layer may be used asone of the first or second electrodes.

At least a portion of the refractive index change layer may be used asthe first electrode, and the plasmonic nano-antenna may be disposedbetween the refractive index change layer and the second electrode.

The light modulator may further comprise a dielectric layer that isdisposed between the refractive index change layer and the plasmonicnano-antenna.

At least a portion of the refractive index change layer may be used asthe first electrode, the second electrode may be disposed at a side ofthe refractive index change layer and the second electrode is spacedapart from the refractive index change layer, and the plasmonicnano-antenna may be disposed at the other side of the refractive indexchange layer.

The light modulator may further comprise a dielectric layer that isdisposed between the refractive index change layer and the secondelectrode.

At least a portion of the plasmonic nano-antenna may be used as one ofthe first or second electrodes.

At least a portion of the plasmonic nano-antenna may be used as thefirst electrode, and the refractive index change layer may be disposedbetween the plasmonic nano-antenna and the second electrode.

The plasmonic nano-antenna may comprise a metallic layer pattern, andthe metallic layer pattern may contact a non-metallic layer.

The non-metallic layer may comprise a dielectric layer.

The non-metallic layer may be the refractive index change layer, or aseparate layer other than the refractive index change layer.

The metallic layer pattern may comprise a shape of at least one of acircular disc, a cross, a cone, a sphere, a hemisphere, a rice grain, anoval disc, and a rod.

A lower surface of the metallic layer pattern may comprise a concavestructure.

The lower surface of the metallic layer pattern may be concaved in theshape of a hemisphere or a pseudo hemisphere.

A thickness of the metallic layer pattern may be equal to or less thanλ/5, where λ is a resonance wavelength of the light modulator.

A plurality of metallic layer patterns may be regularly arranged.

The plurality of metallic layer patterns may be spaced apart from eachother such that adjacent metallic layer patters are spaced apart by adistance d.

The plurality of metallic layer patterns may contact each other.

A distance between centers of two neighboring metallic layer patternsmay be equal to or less than λ/2, where λ is a resonance wavelength ofthe light modulator.

The light modulator may be one of a reflective type, a transmissivetype, or a transflective type.

In another aspect, there is provided an optical apparatus comprising thelight modulator.

The optical apparatus may be a camera.

The camera may be a three-dimensional (3D) camera that uses the lightmodulator as a shutter.

The optical apparatus may be a display device.

The display device may use the light modulator as a color pixel.

The display device may be one of a reflective type, a transmissive type,or a transflective type.

In another aspect, there is provided a light modulator including ananoparticle layer in which a plurality of nanoparticles are arranged, ametallic layer disposed on the nanoparticle layer and that has an unevenstructure on a lower surface, a refractive index change layer that isdisposed on the metallic layer, and a refractive index changing unitconfigured to change a refractive index of the refractive index changelayer.

The metallic layer may comprise a unit structure corresponding to one ofthe nanoparticles, and a plurality of the unit structures may becontinuously arranged.

A distance between centers of two neighboring unit structures may beequal to or less than λ/2, where λ is a resonance wavelength of thelight modulator.

A thickness of each of the plurality of unit structures may be equal toor less than λ/5, where λ is a resonance wavelength of the lightmodulator.

The refractive index changing unit may comprise first and secondelectrodes that are spaced apart from each other and intervening therefractive index change layer, and a voltage applying configured toapply a voltage between the first and second electrodes.

The metallic layer may be one of the first and second electrodes.

An optical apparatus may include the light modulator.

Other features and aspects may be apparent from the following detaileddescription, the drawings, and the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram illustrating an example of a light modulator.

FIGS. 2 through 4 are diagrams illustrating additional examples of lightmodulators.

FIG. 5 is a diagram illustrating an example of a plasmonic nano-antennaused in a light modulator.

FIGS. 6 through 8 are diagrams illustrating examples of arrays ofplasmonic nano-antennas used in a light modulator.

FIG. 9 is a diagram illustrating an example of regularly arranged unitarray structures of plasmonic nano-antennas used in a light modulator.

FIGS. 10A through 10G are diagrams illustrating examples of variousplasmonic nano-antennas used in a light modulator.

FIG. 11 is a diagram illustrating another example of a light modulator.

FIG. 12 is a diagram illustrating examples of a plurality ofnanoparticles illustrated in FIG. 11.

FIG. 13 is a diagram illustrating an example of an incident lightmodulation method of a light modulator.

FIG. 14 is a diagram illustrating another example of an incident lightmodulation method of a light modulator.

FIG. 15 is a diagram illustrating another example of an incident lightmodulation method of a light modulator.

FIG. 16 is a graph illustrating an example of changes in reflectanceaccording to on and off states of a light modulator.

FIG. 17 is a diagram illustrating an example of a reflective color pixelusing a light modulator.

Throughout the drawings and the description, unless otherwise described,the same drawing reference numerals should be understood to refer to thesame elements, features, and structures. The relative size and depictionof these elements may be exaggerated for clarity, illustration, andconvenience.

DETAILED DESCRIPTION

The following description is provided to assist the reader in gaining acomprehensive understanding of the methods, apparatuses, and/or systemsdescribed herein. Accordingly, various changes, modifications, andequivalents of the methods, apparatuses, and/or systems described hereinmay be suggested to those of ordinary skill in the art. Also,descriptions of well-known functions and constructions may be omittedfor increased clarity and conciseness.

A light modulator as described herein may be used in various opticalapparatuses such as a display device, a camera, a television, aprojector, a display of a terminal, and the like. For example, the lightmodulator may be used as a color pixel for modulating colors of adisplay device.

FIG. 1 illustrates an example of a light modulator.

Referring to FIG. 1, the light modulator includes a plasmonicnano-antenna N1 and a refractive index change layer R1 disposed adjacentto the plasmonic nano-antenna N1. The plasmonic nano-antenna N1 mayconvert light (incident light including visible and invisibleelectromagnetic waves) of a certain wavelength (or a certain frequency)into a form of localized surface plasmon resonance to capture itsenergy. The plasmonic nano-antenna N1 may refer to a nano-structuredantenna regarding light. Light of a certain wavelength band may beabsorbed by the plasmonic nano-antenna N1.

As an example, the plasmonic nano-antenna N1 may include a metalliclayer pattern M1. The metallic layer pattern M1 may contact anon-metallic layer (e.g., a dielectric layer). Plasmon resonance mayoccur at an interface between the metallic layer pattern M1 and thenon-metallic layer. In this example, the non-metallic layer is therefractive index change layer R1, which will be described below. Asanother example, the refractive index change layer R1 may be a separatelayer that is different from the refractive index change layer R1. Forconvenience of description, it is assumed hereinafter that the metalliclayer pattern M1 is the plasmonic nano-antenna N1.

The refractive index change layer R1 may contact or be disposed adjacentto the plasmonic nano-antenna N1. For example, the refractive indexchange layer R1 may be a layer of a material that has a refractive indexthat may be changed by an electrical signal. Here, the change inrefractive index may include a change in absorptance (lightabsorptance). Accordingly, the refractive index change layer R1 may be alayer that has a refractive index and an absorptance (light absorptance)that are variable. For example, the refractive index change layer R1 mayinclude an electrooptic material. As described herein, the electroopticmaterial may include a crystalline material such as potassium tantalateniobate (KTN), LiNbO₃, lead zirconate titanate (PZT), and/or one ofvarious polymers having electrooptic characteristics. As anotherexample, the refractive index change layer R1 may include a transparentconductive material. For example, the transparent conductive materialmay include indium tin oxide (ITO), a ZnO-based material such as indiumzinc oxide (IZO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO),and the like. The transparent conductive material may also have arefractive index that may be changed by an electrical signal. As anotherexample, the refractive index change layer R1 may include a combinationof materials, for example, an electrooptic material, a transparentconductive material, and the like.

A refractive index changing unit U1 may be used to change a refractiveindex of the refractive index change layer R1. If the refractive indexchange layer R1 is capable of being changed by an electrical signal, therefractive index changing unit U1 may include an element (e.g., avoltage generator) for applying an electrical signal to the refractiveindex change layer R1. In this example, a first electrode (not shown)connected to the refractive index changing unit U1 may be disposed at aside of the refractive index change layer R1, and a second electrode(not shown) connected to the refractive index changing unit U1 may bedisposed at another side of the refractive index change layer R1. Asanother example, if the refractive index change layer R1 is a conductivematerial layer, the refractive index change layer R1 itself (or aportion thereof) may be used as one of the first and second electrodes.If the refractive index of the refractive index change layer R1 ischanged using an electrical signal, the refractive index may be changedat a very high speed.

If the refractive index of the refractive index change layer R1 ischanged, plasmon resonance characteristics of the plasmonic nano-antennaN1 may be changed. For example, due to the change in refractive index ofthe refractive index change layer R1, a resonance wavelength, aresonance wavelength width, and/or a resonance depth of the plasmonicnano-antenna N1 may be changed. In this example, the plasmonicnano-antenna N1 may capture light of a certain wavelength (or afrequency) in a form of localized surface plasmon resonance. In thisexample, energy may be concentrated on a small region, for example,several nanometers (nm) to several tens of nm of a surface of theplasmonic nano-antenna N1 or around the surface. The plasmon resonancecharacteristics of the plasmonic nano-antenna N1 may be sensitivelychanged (modulated) due to the change in refractive index of therefractive index change layer R1. Thus, even when a refractive indexchange material (e.g., an electrooptic medium) having a small volume isused, a light modulator driven by a low power at a high speed, andhaving a wide modulation range may be realized.

If plasmon resonance is not used and only an electrooptic method isapplied, an electrooptic medium having a large volume is typicallyrequired and a driving voltage is increased. However, as describedherein, the resonance characteristics of the plasmonic nano-antenna N1may be changed (modulated) using a change in refractive index of arefractive index change material (e.g., an electrooptic medium).Accordingly, a thin-film-type light modulator driven by a low power at ahigh speed, and having a wide modulation range and a small volume may berealized. In addition, the resonance wavelength, the resonancewavelength width, resonance polarization characteristics, a resonanceangle, and/or various reflection/absorption/transmission characteristicsof the plasmonic nano-antenna N1 may vary according to a shape/structureand an arrangement of the plasmonic nano-antenna N1. Accordingly, alight modulator having desired characteristics may be manufactured bycontrolling the shape/structure and the arrangement of the plasmonicnano-antenna N1.

Although not shown in FIG. 1, a dielectric layer may be disposed on atleast one of the lower and upper surfaces of the refractive index changelayer R1. If the dielectric layer is disposed between the refractiveindex change layer R1 and the plasmonic nano-antenna N1, the refractiveindex change layer R1 and the plasmonic nano-antenna N1 may be slightlyspaced apart from each other. However, even in this example, because therefractive index change layer R1 and the plasmonic nano-antenna N1 maybe relatively close to each other, the plasmon resonance characteristicsof the plasmonic nano-antenna N1 may be changed due to the change inrefractive index of the refractive index change layer R1.

FIGS. 2 through 4 illustrate additional examples of light modulators.

Referring to FIG. 2, a first electrode E10 is disposed on a substrateSUB10. For example, the first electrode E10 may be a transparentelectrode, an opaque electrode, a translucent electrode, and the like. Arefractive index change layer R10 is disposed on the first electrodeE10. The refractive index change layer R10 may be, for example, anon-conductive layer that includes an electrooptic material. As anotherexample, the refractive index change layer R10 may be a conductive layerthat includes a transparent conductive material. A plasmonicnano-antenna N10 is disposed on the refractive index change layer R10.For example, the plasmonic nano-antenna N10 may include a metallic layerpattern M10.

A predetermined adhesive layer or a seed layer (not shown) may bedisposed between the metallic layer pattern M10 and the refractive indexchange layer R10. The adhesive layer may be, for example, a chromium(Cr) layer. A dielectric layer D10 covers the metallic layer pattern M10of the plasmonic nano-antenna N10. In this example, the metallic layerpattern M10 contacts the dielectric layer D10. In this regard, themetallic layer pattern M10 itself may be regarded as the plasmonicnano-antenna N10. A second electrode E20 is disposed on the dielectriclayer D10. The second electrode E20 may be a transparent electrode. Forexample, the second electrode E20 may be formed of a transparentconductive oxide. A voltage applying unit V1 is connected to the firstand second electrodes E10 and E20. The voltage applying unit V1 mayapply a voltage between the first and second electrodes E10 and E20 toapply an electric field to the refractive index change layer R10. Apermittivity of the refractive index change layer R10 may be changed bythe electric field. As a result, a refractive index of the refractiveindex change layer R10 may be changed.

Although not shown in FIG. 2, an additional dielectric layer may bedisposed between the first electrode E10 and the refractive index changelayer R10 and/or between the refractive index change layer R10 and theplasmonic nano-antenna N10 (i.e., the metallic layer pattern M10). Inthe example in which the additional dielectric layer is disposed betweenthe refractive index change layer R10 and the plasmonic nano-antenna N10(i.e., the metallic layer pattern M10), a thickness of the additionaldielectric layer may be, for example, equal to or less than several tensof nm.

A type of the light modulator illustrated in FIG. 2 may vary accordingto a transparency (or an opacity) of the first electrode E10. Forexample, if the first electrode E10 is a transparent electrode, thelight modulator may act as a transmissive or transflective device. Ifthe first electrode E10 is an opaque electrode, the light modulator mayact as a reflective device. If the first electrode E10 is a translucentelectrode, the light modulator may act as a transflective device.

FIGS. 3 and 4 illustrate examples in which refractive index changelayers R11 and R12 themselves (or portions thereof) are used as firstelectrodes E11 and E12.

Referring to FIG. 3, the refractive index change layer R11 is disposedon a substrate SUB11. In this example, the refractive index change layerR11 may be a conductive layer. For example, the refractive index changelayer R11 may be a layer of a transparent conductive material such as anoxide, e.g., ITO, IZO, AZO, GZO, ZnO, and the like. In this case, therefractive index change layer R11 itself (or a portion thereof) may beused as the first electrode E11. A first dielectric layer D11 isdisposed on the refractive index change layer R11. A metallic layerpattern M11 is disposed on the first dielectric layer D11, and a seconddielectric layer D21 is disposed so as to cover the metallic layerpattern M11. The metallic layer pattern M11 contacting the first andsecond dielectric layers D11 and D21 may be referred to as a plasmonicnano-antenna N11.

A second electrode E21 is disposed on the second dielectric layer D21. Avoltage applying unit V2 is connected to the refractive index changelayer R11 used as the first electrode E11, and the second electrode E21.The voltage applying unit V2 may apply a predetermined voltage betweenthe refractive index change layer R11 and the second electrode E21 toapply an electric field to the refractive index change layer R11. Forexample, a negative (−) voltage may be applied to the refractive indexchange layer R11, and a positive (+) voltage may be applied to thesecond electrode E21. In this example, negative (−) charges may beconcentrated on an upper portion of the refractive index change layerR11, and thus, a refractive index of the upper portion may be changed.Due to the change in refractive index of the refractive index changelayer R11, plasmon resonance characteristics of the plasmonicnano-antenna N11 may be changed.

For example, a thickness of the first dielectric layer D11 disposedbetween the refractive index change layer R11 and the plasmonicnano-antenna N11 may be equal to or less than several tens of nm. As anexample, the thickness of the first dielectric layer D11 may be equal toor less than about 80 nm. If the first dielectric layer D11 has arelatively small thickness, the refractive index change layer R11 andthe plasmonic nano-antenna N11 may be relatively close to each other,and the plasmon resonance characteristics of the plasmonic nano-antennaN11 may be easily changed due to the change in refractive index of therefractive index change layer R11.

Because the refractive index change layer R11 used as the firstelectrode E11 may be a transparent conductive material layer, the lightmodulator illustrated in FIG. 3 may act as a transmissive ortransflective light modulator.

Referring to FIG. 4, a second electrode E22 is disposed on a substrateSUB12, and a dielectric layer D12 is disposed on the second electrodeE22. The refractive index change layer R12 is disposed on the dielectriclayer D12. Like the refractive index change layer R11 illustrated inFIG. 3, the refractive index change layer R12 may be a conductive layer.For example, the refractive index change layer R12 may be a layer of atransparent conductive material including an oxide, e.g., ITO, IZO, AZO,GZO, and/or ZnO. In this example, the refractive index change layer R12may be used as the first electrode E12. For example, the refractiveindex change layer R12 may be an electrically conductive layer, but maybe an ‘optically dielectric layer’. In other words, the refractive indexchange layer R12 may function as a dielectric layer with respect to afrequency of light. As an example a thickness of the refractive indexchange layer R12 may be equal to or less than 100 nm.

A metallic layer pattern M12 is disposed on the refractive index changelayer R12. Because the refractive index change layer R12 may be an‘optically dielectric layer’, the metallic layer pattern M12 may contacta dielectric layer (i.e., the refractive index change layer R12). Themetallic layer pattern M12 may be referred to as a plasmonicnano-antenna N12. Although not shown in FIG. 4, an additional dielectriclayer may be disposed on the refractive index change layer R12 to coverthe plasmonic nano-antenna N12. A voltage applying unit V3 is connectedto the refractive index change layer R12 used as the first electrodeE12, and the second electrode E22. The voltage applying unit V3 mayapply a voltage between the refractive index change layer R12 and thesecond electrode E22 to apply an electric field to the refractive indexchange layer R12. For example, a negative (−) voltage may be applied tothe refractive index change layer R12, and a positive (+) voltage may beapplied to the second electrode E22. In this example, negative (−)charges may be concentrated on a lower portion of the refractive indexchange layer R12, and thus, a refractive index of the lower portion maybe changed. Due to the change in refractive index of the refractiveindex change layer R12, plasmon resonance characteristics of theplasmonic nano-antenna N12 may be changed.

A type of the light modulator illustrated in FIG. 4 may vary accordingto a transparency (or an opacity) of the second electrode E22. If thesecond electrode E22 is a transparent electrode, the light modulator mayact as a transmissive or transflective device. If the second electrodeE22 is an opaque electrode, the light modulator may act as a reflectivedevice. If the second electrode E22 is a translucent electrode, thelight modulator may act as a transflective device.

FIG. 5 illustrates a plasmonic nano-antenna N100 used in a lightmodulator. In FIG. 5, the plasmonic nano-antenna N100 is an example of ashape of the metallic layer pattern M1, M10, M11, and M12 illustrated inFIGS. 1, 2, 3, and 4.

Referring to FIG. 5, the plasmonic nano-antenna N100 has a circular discshape. The plasmonic nano-antenna N100 may form an array as illustratedin FIG. 6.

Referring to FIG. 6, a plurality of plasmonic nano-antennas N100 may beregularly arranged. In this example, a distance d between the centers oftwo neighboring plasmonic nano-antennas N100 may be equal to or lessthan λ/2, equal to or less than λ/3, and the like. In this example, λ isa resonance wavelength of a light modulator, i.e., a resonancewavelength of the plasmonic nano-antenna N100. For example, a thicknesst of the plasmonic nano-antennas N100 may be equal to or less than λ/5,equal to or less than λ/10, equal to or greater than λ/20, and the like.If the distance d between the centers of two neighboring plasmonicnano-antennas N100 satisfies an above condition, incident light may betransmitted or reflected without generating additional diffracted light.Also, if the thickness t of the plasmonic nano-antennas N100 satisfiesan above condition, the number of resonance wavelengths (absorptionwavelengths) may not be excessively increased to equal to or greaterthan two.

The example of the array structure illustrated in FIG. 6, in which theplasmonic nano-antennas N100 are regularly arranged, may operate as onesingle medium or one effective medium.

An arrangement of the plasmonic nano-antennas N100 is not restricted tothe example illustrated in FIG. 6, and may be variously changed. Forexample, although the plasmonic nano-antennas N100 are spaced apart fromeach other at predetermined intervals in FIG. 6, the plasmonicnano-antennas N100 may be arranged to contact each other as illustratedin FIG. 7. As another example, the plasmonic nano-antennas N100 may havea closely packed structure as illustrated in FIG. 8.

A structure (an array structure) of the plasmonic nano-antennas N100that are regularly arranged as illustrated in FIG. 6, 7, or 8 may formone unit structure (hereinafter referred to as a unit array structure).The unit array structures may be repeatedly arranged as illustrated inFIG. 9.

In FIG. 9, a reference numeral NA100 refers to a unit array structure.That is, the unit array structure NA100 may be one of the arraystructures illustrated in the examples of FIGS. 6 through 8. Thestructure illustrated in FIG. 9 may operate as a spatial lightmodulator. For example, one or more of the unit array structures NA100in FIG. 9 may be applied to one pixel.

Meanwhile, the shape of the plasmonic nano-antenna N100 is not limitedto the examples illustrated in FIGS. 5 through 8, and may be variouslychanged. For example, the plasmonic nano-antenna N100 may have one ofvarious shapes illustrated in FIGS. 10A through 10G.

Referring to FIGS. 10A through 10G, the plasmonic nano-antenna N100 mayhave one of various shapes, for example, a cross (FIG. 10A), a cone(FIG. 10B), a sphere (FIG. 10C), a hemisphere (FIG. 10D), a rice grain(FIG. 10E), an oval disc (FIG. 10F), a rod (FIG. 10G), a combinationthereof, and the like. Here, the cross (FIG. 10A), the cone (FIG. 10B),the sphere (FIG. 10C), and the hemisphere (FIG. 10D) are symmetricalshapes like the circular disc illustrated in FIG. 5. Meanwhile, the ricegrain (FIG. 10E), the oval disc (FIG. 10F), and the rod (FIG. 10G) areshapes that are elongated in a direction.

The plasmonic nano-antenna N100 may have a multilayer structure. Forexample, if a shape of the plasmonic nano-antenna N100 is the sphere(FIG. 10C), the plasmonic nano-antenna N100 may include a core portionand at least one shell portion. In addition, plasmonic nano-antennasthat have two or more different shapes may form one unit and a pluralityof the units may be regularly (periodically) arranged.

A resonance wavelength, a resonance wavelength width, resonancepolarization characteristics, a resonance angle, and/orreflection/absorption/transmission characteristics of the plasmonicnano-antenna N100 may vary based on the shape and the arrangement of theplasmonic nano-antennas N100. Accordingly, a light modulator havingdesired characteristics may be easily manufactured by controlling theshape and the arrangement of the plasmonic nano-antennas N100.

FIG. 11 illustrates another example of a light modulator.

Referring to FIG. 11, a nanoparticle layer P13 including a plurality ofnanoparticles 10 is disposed on a substrate SUB13. For example, thenanoparticles 10 may be formed of a dielectric material. In this case, arefractive index of the dielectric may be, for example, about 1 to about2. The nanoparticles 10 may be formed of a material other than thedielectric. A metallic layer M13 is disposed on the nanoparticle layerP13. For example, the metallic layer M13 may be formed of gold (Au),silver (Ag), copper (Cu), aluminum (Al), a combination thereof, and thelike. Because the metallic layer M13 is formed on the nanoparticle layerP13, a lower surface of the metallic layer M13 may have an unevenstructure. A portion of the metallic layer M13 corresponding to one ofthe nanoparticles 10 (see a magnified part in FIG. 11) is referred to as“a unit nanostructure n1”. In this example, the unit nanostructure n1has a concave lower surface. In this case, the concave lower surface isa hemispherical surface or a pseudo hemispherical surface. The unitnanostructure n1 may be a “plasmonic nano-antenna”. The metallic layerM13 may be a structure in which a plurality of unit nanostructures n1are continuously arranged.

A refractive index change layer R13 is disposed on the metallic layerM13, and an electrode E23 is disposed on the refractive index changelayer R13. The metallic layer M13 itself (or a portion thereof) may beused as a first electrode E13. In this example, the electrode E23disposed on the refractive index change layer R13 is referred to as asecond electrode E23. A voltage applying unit V4 is connected to therefractive index change layer R13 and the second electrode E23. Thevoltage applying unit V4 may apply a voltage between the metallic layerM13 and the second electrode E23 to change a refractive index of therefractive index change layer R13. A structure of a first region A1 thatis indicated by a dashed line in FIG. 11 may not be provided. Forexample, the structure of the first region A1 may be removed. Althoughnot shown in FIG. 11, a dielectric layer may be disposed between themetallic layer M13 and the refractive index change layer R13 and/orbetween the refractive index change layer R13 and the second electrodeE23.

In FIG. 11, as an example, a diameter of the nanoparticles 10 may beabout 200 nm to about 600 nm. A distance from an upper vertex of thenanoparticle 10 to an upper surface of the metallic layer M13, i.e., athickness of the thinnest part of the metallic layer M13, may be equalto or less than about 20 nm. As another example, a thickness of therefractive index change layer R13 may be about 500 nm to about 100 μm.The voltage applied by the voltage applying unit V4 between therefractive index change layer R13 and the second electrode E23 may be,for example, in a range of several to several hundred V such as about 2Vto about 200V. It should be appreciated that the sizes and the thicknessof elements and the voltage condition are merely for purposes ofexample, and may be variously changed.

FIG. 12 illustrates an example of the nanoparticles 10 illustrated inFIG. 11.

Referring to FIG. 12, the nanoparticles 10 have a closely packedstructure. For example, a distance d between centers of two neighboringnanoparticles 10 may be equal to or less than λ/2, equal to or less thanλ/3, and the like. Here, λ is a resonance wavelength of the lightmodulator, i.e., a resonance wavelength of the plasmonic nano-antenna.The structure of FIG. 12 is an example and may be variously changed. Forexample, the nanoparticles 10 may not have a closely packed structure.

According to various examples, the light modulator may be a reflective,transmissive, or transflective type. FIGS. 13 through 15 illustrateexamples of modulation methods of an incident light, according to thetype of a light modulator.

FIG. 13 illustrates an example in which a light modulator LM1 is areflective type. Referring to FIG. 13, the light modulator LM1 mayreflect or absorb light information incident with various angles andpolarizations. The reflected light may be incident on a predetermineddetector or an optical system. In this example, reflection and/orabsorption characteristics may be modulated according to an on/off stateof the light modulator LM1. That is, characteristics of the light(reflected light) incident on the detector or the optical system mayvary according to the on/off state of the light modulator LM1.

FIG. 14 illustrates an example in which a light modulator LM2 is atransmissive type. Referring to FIG. 14, the light modulator LM2 maytransmit or absorb light information incident with various angles andpolarizations. The transmitted light may be incident on a predetermineddetector or an optical system. In this example, transmission and/orabsorption characteristics may be modulated according to an on/off stateof the light modulator LM2. That is, characteristics of the light(transmitted light) incident on the detector or the optical system mayvary according to the on/off state of the light modulator LM2.

FIG. 15 illustrates an example in which a light modulator LM3 is atransflective type. Referring to FIG. 15, the light modulator LM3 mayreflect a portion of incident light, may transmit another portion of theincident light, and may absorb another portion of the incident light. Inthis example, reflection, transmission, and/or absorptioncharacteristics may be modulated according to an on/off state of thelight modulator LM3.

FIG. 16 is a graph illustrating an example of changes in reflectanceaccording to on and off states of a light modulator. In FIG. 16, a firstplot G1 illustrates an example in which the light modulator is in theoff state, and a second plot G2 illustrates an example in which thelight modulator is in the on state.

Referring to FIG. 16, the second plot G2 is located to the right of thefirst plot G1, which shows that reflection and absorptioncharacteristics are greatly changed if the light modulator is turned on.For example, in the off state, light of a first wavelength λ1 isabsorbed while light other than the first wavelength λ1 is reflected. Onthe other hand, in the on state, light of a second wavelength λ2 isabsorbed while light other than the second wavelength λ2 is reflected.In this example, the second wavelength λ2 is located to the right of thefirst wavelength λ1. If a difference (Δλ) between the first wavelengthλ1 and the second wavelength λ2 is relatively large, a modulation widthof the light modulator is relatively large. Accordingly, light of thefirst wavelength λ1 is not reflected and is mostly absorbed in the offstate, but is mostly reflected in the on state. As a result,characteristics of reflected light may greatly vary according to theon/off state of the light modulator. For example, a color of thereflected light may vary according to the on/off state of the lightmodulator.

Meanwhile, if the light modulator is a transmissive type, in the offstate, light of a predetermined first wavelength may be absorbed whilelight other than the first wavelength is transmitted. On the other hand,in the on state, light of a predetermined second wavelength may beabsorbed while light other than the second wavelength may betransmitted. Accordingly, characteristics of transmitted light may varyaccording to the on/off state of the light modulator.

As described herein, reflection, transmission, and/or absorptioncharacteristics of incident light may be changed by changing arefractive index of a refractive index change layer. In doing so,plasmon resonance characteristics of a plasmonic nano-antenna adjacentto the refractive index change layer may be changed. For example, anabsorption wavelength, polarization characteristics, and a viewing anglemay be variously controlled by controlling a shape and an arrangement ofmetallic layer patterns used as plasmonic nano-antennas. Further, alight modulator may modulate a phase of incident light. That is, thelight modulator may be a light modulator that has a phase modulationfunction.

FIG. 17 illustrates an example of a reflective color pixel PX1 using alight modulator. As illustrated in FIG. 17, the reflective color pixelPX1 may include a plurality of sub pixels R, G, and B for modulatingvarious colors. The sub pixels R, G, and B may be configured to modulatedifferent colors (red, green, and blue), and may include arraystructures, for example, that are similar to those illustrated in FIG.9.

Although FIG. 17 illustrates the reflective color pixel PX1 used in areflective display device, a light modulator described herein may beused on various purposes in transmissive and transflective displaydevices in addition to the reflective display device. Also, the lightmodulator may be used in variously driven display devices as well as adisplay device driven by a constant voltage. For example, a displaydevice using a light modulator according to various examples herein maybe driven by a low power at a high speed.

As another example, if a light modulator is used in a camera, forexample, the light modulator may be used as a shutter for allowing orblocking a flow of light of a certain wavelength. For example, the lightmodulator may be used as a shutter to allow or to block a flow ofpulse-type light of an infrared wavelength at a high speed. In thisexample, the light modulator may be used as a shutter for modulating anoptical signal to extract depth information in a three-dimensional (3D)camera based on a time-of-flight method. If the light modulator is used,a solid state shutter driven by a low power at a high speed (e.g., alevel of 100 MHz) may be realized.

The examples in which the light modulator is used in a display deviceand a camera are representatively described above, however, the lightmodulator may also be used in various optical apparatus other than thedisplay and the camera.

Furthermore, although an example in which a refractive index of arefractive index change layer is changed by an electrical signal isrepresentatively described above, the refractive index of the refractiveindex change layer may be changed using methods other than the methodusing the electrical signal. For example, the refractive index of therefractive index change layer may be changed by heat or mechanicalstrain (contraction/expansion, electro-wetting, etc.). In this case, astructure of an element for changing the refractive index of therefractive index change layer, i.e., a refractive index changing unit,may be different from the above description. In other words, a lightmodulator according to various examples herein may operate by using athermal or mechanical modulation method instead of an electroopticmodulation method.

Program instructions to perform a method described herein, or one ormore operations thereof, may be recorded, stored, or fixed in one ormore computer-readable storage media. The program instructions may beimplemented by a computer. For example, the computer may cause aprocessor to execute the program instructions. The media may include,alone or in combination with the program instructions, data files, datastructures, and the like. Examples of computer-readable storage mediainclude magnetic media, such as hard disks, floppy disks, and magnetictape; optical media such as CD ROM disks and DVDs; magneto-opticalmedia, such as optical disks; and hardware devices that are speciallyconfigured to store and perform program instructions, such as read-onlymemory (ROM), random access memory (RAM), flash memory, and the like.Examples of program instructions include machine code, such as producedby a compiler, and files containing higher level code that may beexecuted by the computer using an interpreter. The program instructions,that is, software, may be distributed over network coupled computersystems so that the software is stored and executed in a distributedfashion. For example, the software and data may be stored by one or morecomputer readable storage mediums. Also, functional programs, codes, andcode segments for accomplishing the example embodiments disclosed hereincan be easily construed by programmers skilled in the art to which theembodiments pertain based on and using the flow diagrams and blockdiagrams of the figures and their corresponding descriptions as providedherein. Also, the described unit to perform an operation or a method maybe hardware, software, or some combination of hardware and software. Forexample, the unit may be a software package running on a computer or thecomputer on which that software is running.

A number of examples have been described above. Nevertheless, it will beunderstood that various modifications may be made. For example, suitableresults may be achieved if the described techniques are performed in adifferent order and/or if components in a described system,architecture, device, or circuit are combined in a different mannerand/or replaced or supplemented by other components or theirequivalents. Accordingly, other implementations are within the scope ofthe following claims.

It would be understood by one of ordinary skill in the art that astructure in which a material of a metallic layer pattern and a materialof a dielectric layer contacting the metallic layer pattern are switched(i.e., an inverse structure) is also available. Also, it would beunderstood by one of ordinary skill in the art that plasmon resonancecharacteristics of a plasmonic nano-antenna may also be changed due to achange in optical characteristics other than a change in refractiveindex.

What is claimed is:
 1. A light modulator comprising: a plasmonicnano-antenna comprising a plurality of unit structures which from anarray pattern; a refractive index change layer that is disposed adjacentto the plasmonic nano-antenna; and a refractive index changing unitconfigured to change a refractive index of the refractive index changelayer, wherein a distance between centers of neighboring two unitstructures of the plurality of unit structures is equal to or less thanλ/2, where λ is a resonance wavelength of the light modulator.
 2. Thelight modulator of claim 1, wherein the distance between centers of theneighboring two unit structures is equal to or less than λ/3, where λ isa resonance wavelength of the light modulator.
 3. The light modulator ofclaim 1, wherein a thickness of each of the plurality of unit structuresis equal to or less than λ/5, where λ is a resonance wavelength of thelight modulator.
 4. The light modulator of claim 3, wherein thethickness of each of the plurality of unit structures is equal to orgreater than λ/20 and equal to or less than λ/10, where λ is a resonancewavelength of the light modulator.
 5. The light modulator of claim 1,wherein at least one unit structure of the plurality of unit structuresis disposed on an upper surface of the refractive index change layer, adielectric layer is further provided on the upper surface of therefractive index change layer to cover an upper surface and a sidesurface of the at least one unit structure, and the refractive indexchange layer is located under the at least one unit structure and thedielectric layer.
 6. The light modulator of claim 5, wherein therefractive index change layer is farther from a light incident side ofthe light modulator than the dielectric layer.
 7. The light modulator ofclaim 1, wherein the refractive index change layer comprises a materialthat has a refractive index that is capable of being changed by anelectrical signal.
 8. The light modulator of claim 1, wherein therefractive index change layer comprises an electrically conductivetransparent material.
 9. The light modulator of claim 8, wherein theelectrically conductive transparent material comprises at least one ofindium tin oxide (ITO) and a zinc oxide (ZnO)-based material.
 10. Thelight modulator of claim 1, wherein the refractive index changing unitcomprises: first and second electrodes spaced apart from each other,wherein the refractive index change layer is disposed between the firstand second electrodes; and a voltage applying unit configured to apply avoltage between the first and second electrodes.
 11. The light modulatorof claim 10, wherein the refractive index change layer is in contactwith the first electrode, and the plasmonic nano-antenna is disposedbetween the refractive index change layer and the second electrode. 12.The light modulator of claim 10, wherein at least a portion of therefractive index change layer is used as the first electrode, and theplasmonic nano-antenna is disposed between the refractive index changelayer and the second electrode.
 13. The light modulator of claim 12,further comprising a dielectric material layer that is disposed betweenthe refractive index change layer and the plasmonic nano-antenna. 14.The light modulator of claim 10, wherein at least a portion of therefractive index change layer is used as the first electrode, the secondelectrode is disposed at a side of the refractive index change layer andthe second electrode is spaced apart from the refractive index changelayer, and the plasmonic nano-antenna is disposed at the other side ofthe refractive index change layer.
 15. The light modulator of claim 14,further comprising a dielectric material layer that is disposed betweenthe refractive index change layer and the second electrode.
 16. Thelight modulator of claim 10, wherein at least a portion of the plasmonicnano-antenna is one of the first or second electrodes.
 17. The lightmodulator of claim 16, wherein at least a portion of the plasmonicnano-antenna is the first electrode, and the refractive index changelayer is disposed between the plasmonic nano-antenna and the secondelectrode.
 18. The light modulator of claim 1, wherein the lightmodulator is one of a reflective type, a transmissive type, or atransflective type.
 19. An optical apparatus comprising the lightmodulator of claim
 1. 20. A light modulator comprising: a plasmonicnano-antenna; a refractive index change layer that is disposed adjacentto the plasmonic nano-antenna; and a refractive index changing unitconfigured to change a refractive index of the refractive index changelayer, wherein, in response to the refractive index changing unitchanging the refractive index of the refractive index change layer,plasmon resonance characteristics of the plasmonic nano-antenna arechanged, the plasmonic nano-antenna is disposed on an upper surface ofthe refractive index change layer, a dielectric layer is provided on theupper surface of the refractive index change layer to cover an uppersurface of the plasmonic nano-antenna, and the refractive index changelayer is located under the plasmonic nano-antenna and the dielectriclayer, and the refractive index change layer is farther from a lightincident side of the light modulator than the dielectric layer.
 21. Alight modulator comprising: a plasmonic nano-antenna; a refractive indexchange layer that is disposed adjacent to the plasmonic nano-antenna;and a refractive index changing unit configured to change a refractiveindex of the refractive index change layer, wherein, in response to therefractive index changing unit changing the refractive index of therefractive index change layer, plasmon resonance characteristics of theplasmonic nano-antenna are changed, and the refractive index changelayer comprises an electrical conductive transparent material.